在SEM或者FE-SEM研究領(lǐng)域，有時(shí)對(duì)導(dǎo)電膜層要求非常高，這時(shí)常規(guī)的金、鉑等金屬已經(jīng)不能滿足要求，相對(duì)而言金屬鋨的顆粒更小，膜層細(xì)膩平坦，即使幾個(gè)納米厚度的膜，膜層也會(huì)獲得非常好的導(dǎo)電性。我們推出的OPC鋨膜鍍膜儀是一款劃時(shí)代的鍍膜儀器。
不同與常規(guī)的離子濺射和蒸鍍的膜層加工，OPC鋨膜鍍膜儀采用了全新的四氧化鋨氣體壓縮方式獲得鋨膜，質(zhì)量更好，效率更高。不論是離子濺射還是蒸鍍，當(dāng)高倍觀察時(shí)，膜層粒子本身的粒度過(guò)大帶來(lái)的問(wèn)題是不可避免的。而OPC鋨膜鍍膜儀很好的解決了這個(gè)問(wèn)題?，F(xiàn)在推薦兩款鋨膜鍍膜儀，60A和80T，其中， 60A僅供掃描電鏡制膜用
儀器參數(shù)：
|
型號(hào) |
OPC-80T |
OPC-60A |
|
腔室 |
Hard glass chamber: 160mm(OD)x105mm(H) |
Hard glass chamber: 120mm(OD)x73mm(H) |
|
膜厚 |
a few - few dozen nm
|
a few - few dozen nm
|
|
樣品臺(tái) |
Two holes for 10mm dia SEM holder, Two holes for 15mm dia SEM holder, and one hole for 32mm dia SEM holder |
Seven holes for 10mm dia SEM holder, Four holes for 15mm dia SEM holder, or One hole for 32mm dia SEM holder |
|
鍍膜種類 |
Osmium(OsO4) |
Osmium |
|
鋨儲(chǔ)存 |
Detachable, sealing up, has view port, is able to be stored in a freezer
|
Detachable, sealing up, has view port, is able to be stored in a freezer
|
|
|
Detachable, has view port |
|
|
氣體輸入 |
OsO4 ampoule is split in an OsO4 reservoir and its sublimated gas is introduced into gas reactor chamber. |
OsO4 ampoule is split in an OsO4 reservoir and its subkimated gas is introduced into gas reactor chamber. |
|
電源 |
AC100V 2A 200W(50/60Hz) |
AC100V 2A 200W(50/60Hz) |
|
尺寸 |
450(w)x410(D)x390(H)mm |
450(w)x350(D)x330(H)mm |
|
重量 |
Approx. 30kg |
Approx. 20kg |
訂購(gòu)信息
|
貨號(hào) |
產(chǎn)品描述 |
規(guī)格 |
|
OPC-60A |
鋨膜鍍膜儀Osmium Plasma Coater |
臺(tái) |
|
OPC-80T |
鋨膜鍍膜儀Osmium Plasma Coater |
臺(tái) |